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WELDED STAINLESS STEEL CYLINDERS FOR ULTRA-HIGH PURITY MATERIALS (GASES)

Product Introduction

WELDED STAINLESS STEEL CYLINDERS FOR ULTRA-HIGH PURITY MATERIALS (GASES)

A. MO Source

MO source stands for metal organic source, which is a high-purity compound composed of metal elements and organic ligands. Its purity directly affects the performance of downstream products, mainly including:


No.

Name

Abbreviation

Molecular Formula or Structural Formula

CAS NO.

1

Trimethylaluminum

‌TMAl

Al(CH₃)₃

75-24-1

2

Trisilylamine

TSA

(SiH3)3N

13862-16-3

3

Trimethylindium

TMIn

In(CH₃)₃

3385-78-2

4

Trimethyl Gallium

TMG

Ga(CH₃)₃

1445-79-0

5

Triethylgallium

TEG

Ga(C2H5)3

1115-99-7

6

Triethylaluminum

TEAl

(C2H5)3Al

97-93-8

7

Diethylaluminum Ethoxide

DEAlO

(C2H5)2AlOC2H5

1586-92-1

8

Triethylamine‌‌

TEA

(C2H5)3N

121-44-8

9

Triethylantimony

‌TESb

Sb(C₂H₅)₃

617-85-6

10

Magnesium Cyclopentadienide

‌Cp₂Mg

Mg(C₅H₅)₂

1284-72-6

11

Ferrocene

Fc

Fe(C₅H₅)₂

102-54-5

12

Cyclohexane‌‌

C₆H₁₂

110-82-7

13

Trimethylantimony‌‌

Sb(CH₃)₃

594-10-5

14

Dimethylzinc‌‌

Zn(CH₃)₂

544-97-8

15

‌Carbon Tetrabromide

CBr₄

558-13-4

16

Bromotrichloromethane

CBrCl₃

75-62-7

17

Vanadium Tetrakis(dimethylamide)

TDMAV

V(N(CH₃)₂)₄

19824-56-7

18

Hafnium Tetrakis(ethylmethylamide)

TEMAHf

Hf(N(CH₃)(CH₂CH₃))₄

352535-01-4

19

Tetrakis(dimethylamino)titanium(IV)

TDMATi

Ti(N(CH₃)₂)₄

3275-24-9

20

Diethyltelluride‌

DETe

CH₃CH₂-Te-Te-CH₂CH₃‌

627-54-3

21

Diethylzinc

DEZ

Zn(C₂H₅)₂

557-20-0

22

Antimony Trioxide or Diantimony Trioxide‌

ATO

Sb₂O₃

1309-64-4

23

Tris(dimethylamino)silane

TDMAS

SiH(N(CH₃)₂)₃

15112-89-7

24

Tetrakis(dimethylamido)hafnium(IV)

TDMAHf

[(CH3)2N]4Hf

19782-68-4

25

Tetrakis(dimethylamido)zirconium(IV)

TDMAZr

[(CH3)2N]4Zr

19756-04-8

26

Tetrakis(ethylmethylamino)zirconium(IV)

TEMAZr

(CH3C2H5N)4Zr

175923-04-3

27

Tetrakis(dimethylamino)tin

TDMASn

[(CH3)2N]4Sn

1066-77-9

28

Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)yttrium(III)

Y(TMHD)3

C33H57O6Y

15632-39-0

29

Pentakis(dimethylamino)tantalum(V)

PDMAT

(N(CH3)2)5Ta

19824-59-0

30

Water

DI water

H2O

7732-18-5

31

Methylmagnesium Cyclopentadienide

‌MeCpMg

CH₃MgC₅H₅

40672-08-0‌‌

32

Gallium Trichloride

GaCl₃

13450-90-3‌‌

33

Tetramethylsilane

TMS

Si(CH₃)₄

75-76-3‌‌

34

tert-Butylphosphine

TBP

(CH₃)₃CPH₂

2501-94-2‌‌

35

Bis(ethylcyclopentadienyl)magnesium

‌EtCp₂Mg

Mg(C₂H₅C₅H₄)₂

114460-02-5‌‌

36

Bis(tert-butylamino)silane

‌BTBAS

SiH₂(NHC(CH₃)₃)₂

186598-40-3‌‌

37

Hexachlorodisilane

‌HCDS

Cl₃Si-SiCl₃

13465-77-5‌‌

38

Chlorosilanes

RₙSiCl₄₋ₙ

13465-78-6‌‌

39

Tetrakis(dimethylamido)titanium

‌TDMAT

Ti(N(CH₃)₂)₄

3275-24-9‌‌

40

Tetraethyl Orthosilicate

‌TEOS

Si(OC₂H₅)₄

78-10-4‌‌

Main uses of MO sources

1. Semiconductor field: chemical vapor deposition (CVD) and other processes, phase change memory, semiconductor lasers, radiofrequency integrated circuit chips, etc.

2. Optoelectronics field: manufacturing of devices, such as light-emitting diodes (LEDs) and laser diodes.

3. 5G communication technology.

4. New energy field: preparation of efficient solar cell materials.

5. Smart devices and Internet of Things (IoT) field.

B. Precursor

Precursor refers to the intermediate material form between raw materials and the final product, requiring conversion through calcination, deposition, or other reactions.

a. Classification of precursors

1. High-K dielectric precursors:‌ Feature thermal stability, process reliability, and volatility to reduce device leakage and improve yield.

2. Silicon oxide / nitride precursors:‌ Used in double lithography and sidewall spacers to protect integrated circuit gate properties.

b. Main application areas of precursors

1. Semiconductor manufacturing

Chemical vapor deposition (CVD), atomic layer deposition (ALD), epitaxial growth, etching, ion implantation doping, cleaning, etc.

Metal and metal nitride precursors are used for capacitor electrodes, gate transition layers, isolation materials in semiconductor storage and logic chips, and phase change materials in phase change memory.

2. Lithium-ion battery

It is composed of nickel, cobalt, manganese (or aluminum), which is processed to form positive electrode materials to improve battery energy density and safety.

3. Other fields

Ceramic / glass: Improve sintering performance.

OLED packaging: Moisture barrier for extended device lifespan.


KAIGEN's Advantages:‌

· Industrial ingot segregation simulation

· Ultra-high purity raw material smelting and purification

· High-purity stainless steel industrial preparation

· High-purity material cold processing

· Custom high-purity material solutions

· Physicochemical surface treatments

· Ultra-low precipitation surface technology


If you are concerned about the quality of MO sources, precursors, gases, and other filling media, or you are concerned about the quality of related gas cylinders and packaging materials, please rest assured to choose KAIGEN.