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WELDED STAINLESS STEEL CYLINDERS FOR ULTRA-HIGH PURITY MATERIALS (GASES)
WELDED STAINLESS STEEL CYLINDERS FOR ULTRA-HIGH PURITY MATERIALS (GASES)
A. MO Source
MO source stands for metal organic source, which is a high-purity compound composed of metal elements and organic ligands. Its purity directly affects the performance of downstream products, mainly including:
|
No. |
Name |
Abbreviation |
Molecular Formula or Structural Formula |
CAS NO. |
|
1 |
Trimethylaluminum |
TMAl |
Al(CH₃)₃ |
75-24-1 |
|
2 |
Trisilylamine |
TSA |
(SiH3)3N |
13862-16-3 |
|
3 |
Trimethylindium |
TMIn |
In(CH₃)₃ |
3385-78-2 |
|
4 |
Trimethyl Gallium |
TMG |
Ga(CH₃)₃ |
1445-79-0 |
|
5 |
Triethylgallium |
TEG |
Ga(C2H5)3 |
1115-99-7 |
|
6 |
Triethylaluminum |
TEAl |
(C2H5)3Al |
97-93-8 |
|
7 |
Diethylaluminum Ethoxide |
DEAlO |
(C2H5)2AlOC2H5 |
1586-92-1 |
|
8 |
Triethylamine |
TEA |
(C2H5)3N |
121-44-8 |
|
9 |
Triethylantimony |
TESb |
Sb(C₂H₅)₃ |
617-85-6 |
|
10 |
Magnesium Cyclopentadienide |
Cp₂Mg |
Mg(C₅H₅)₂ |
1284-72-6 |
|
11 |
Ferrocene |
Fc |
Fe(C₅H₅)₂ |
102-54-5 |
|
12 |
Cyclohexane |
— |
C₆H₁₂ |
110-82-7 |
|
13 |
Trimethylantimony |
— |
Sb(CH₃)₃ |
594-10-5 |
|
14 |
Dimethylzinc |
— |
Zn(CH₃)₂ |
544-97-8 |
|
15 |
Carbon Tetrabromide |
— |
CBr₄ |
558-13-4 |
|
16 |
Bromotrichloromethane |
— |
CBrCl₃ |
75-62-7 |
|
17 |
Vanadium Tetrakis(dimethylamide) |
TDMAV |
V(N(CH₃)₂)₄ |
19824-56-7 |
|
18 |
Hafnium Tetrakis(ethylmethylamide) |
TEMAHf |
Hf(N(CH₃)(CH₂CH₃))₄ |
352535-01-4 |
|
19 |
Tetrakis(dimethylamino)titanium(IV) |
TDMATi |
Ti(N(CH₃)₂)₄ |
3275-24-9 |
|
20 |
Diethyltelluride |
DETe |
CH₃CH₂-Te-Te-CH₂CH₃ |
627-54-3 |
|
21 |
Diethylzinc |
DEZ |
Zn(C₂H₅)₂ |
557-20-0 |
|
22 |
Antimony Trioxide or Diantimony Trioxide |
ATO |
Sb₂O₃ |
1309-64-4 |
|
23 |
Tris(dimethylamino)silane |
TDMAS |
SiH(N(CH₃)₂)₃ |
15112-89-7 |
|
24 |
Tetrakis(dimethylamido)hafnium(IV) |
TDMAHf |
[(CH3)2N]4Hf |
19782-68-4 |
|
25 |
Tetrakis(dimethylamido)zirconium(IV) |
TDMAZr |
[(CH3)2N]4Zr |
19756-04-8 |
|
26 |
Tetrakis(ethylmethylamino)zirconium(IV) |
TEMAZr |
(CH3C2H5N)4Zr |
175923-04-3 |
|
27 |
Tetrakis(dimethylamino)tin |
TDMASn |
[(CH3)2N]4Sn |
1066-77-9 |
|
28 |
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)yttrium(III) |
Y(TMHD)3 |
C33H57O6Y |
15632-39-0 |
|
29 |
Pentakis(dimethylamino)tantalum(V) |
PDMAT |
(N(CH3)2)5Ta |
19824-59-0 |
|
30 |
Water |
DI water |
H2O |
7732-18-5 |
|
31 |
Methylmagnesium Cyclopentadienide |
MeCpMg |
CH₃MgC₅H₅ |
40672-08-0 |
|
32 |
Gallium Trichloride |
— |
GaCl₃ |
13450-90-3 |
|
33 |
Tetramethylsilane |
TMS |
Si(CH₃)₄ |
75-76-3 |
|
34 |
tert-Butylphosphine |
TBP |
(CH₃)₃CPH₂ |
2501-94-2 |
|
35 |
Bis(ethylcyclopentadienyl)magnesium |
EtCp₂Mg |
Mg(C₂H₅C₅H₄)₂ |
114460-02-5 |
|
36 |
Bis(tert-butylamino)silane |
BTBAS |
SiH₂(NHC(CH₃)₃)₂ |
186598-40-3 |
|
37 |
Hexachlorodisilane |
HCDS |
Cl₃Si-SiCl₃ |
13465-77-5 |
|
38 |
Chlorosilanes |
— |
RₙSiCl₄₋ₙ |
13465-78-6 |
|
39 |
Tetrakis(dimethylamido)titanium |
TDMAT |
Ti(N(CH₃)₂)₄ |
3275-24-9 |
|
40 |
Tetraethyl Orthosilicate |
TEOS |
Si(OC₂H₅)₄ |
78-10-4 |
Main uses of MO sources
1. Semiconductor field: chemical vapor deposition (CVD) and other processes, phase change memory, semiconductor lasers, radiofrequency integrated circuit chips, etc.
2. Optoelectronics field: manufacturing of devices, such as light-emitting diodes (LEDs) and laser diodes.
3. 5G communication technology.
4. New energy field: preparation of efficient solar cell materials.
5. Smart devices and Internet of Things (IoT) field.
B. Precursor
Precursor refers to the intermediate material form between raw materials and the final product, requiring conversion through calcination, deposition, or other reactions.
a. Classification of precursors
1. High-K dielectric precursors: Feature thermal stability, process reliability, and volatility to reduce device leakage and improve yield.
2. Silicon oxide / nitride precursors: Used in double lithography and sidewall spacers to protect integrated circuit gate properties.
b. Main application areas of precursors
1. Semiconductor manufacturing
Chemical vapor deposition (CVD), atomic layer deposition (ALD), epitaxial growth, etching, ion implantation doping, cleaning, etc.
Metal and metal nitride precursors are used for capacitor electrodes, gate transition layers, isolation materials in semiconductor storage and logic chips, and phase change materials in phase change memory.
2. Lithium-ion battery
It is composed of nickel, cobalt, manganese (or aluminum), which is processed to form positive electrode materials to improve battery energy density and safety.
3. Other fields
Ceramic / glass: Improve sintering performance.
OLED packaging: Moisture barrier for extended device lifespan.
KAIGEN's Advantages:
· Industrial ingot segregation simulation
· Ultra-high purity raw material smelting and purification
· High-purity stainless steel industrial preparation
· High-purity material cold processing
· Custom high-purity material solutions
· Physicochemical surface treatments
· Ultra-low precipitation surface technology
If you are concerned about the quality of MO sources, precursors, gases, and other filling media, or you are concerned about the quality of related gas cylinders and packaging materials, please rest assured to choose KAIGEN.
